A STUDY OF THE NONLINEAR RESPONSE OF A RESONANT MICRO-BEAM TO AN ELECTRIC ACTUATION

Abstract

An investigation into the response of a resonant microbeam to anelectric actuation is presented. A nonlinear model is used to accountfor the mid-plane stretching, a DC electrostatic force, and an ACharmonic force. Design parameters are included in the model by lumpingthem into nondimensional parameters. A perturbation method, the methodof multiple scales, is used to obtain two first-order nonlinearordinary-differential equations that describe the modulation of theamplitude and phase of the response and its stability. The model and theresults obtained by the perturbation analysis are validated by comparingthem with published experimental results. The case of three-to-oneinternal resonance is treated. The effect of the design parameters on the dynamic responses isdiscussed. The results show that increasing the axial force improves thelinear characteristics of the resonance frequency and decreases theundesirable frequency shift produced by the nonlinearities. In contrast,increasing the mid-plane stretching has the reverse effect. Moreover,the DC electrostatic load is found to affect the qualitative andquantitative nature of the frequency-response curves, resulting ineither a softening or a hardening behavior. The results also show thatan inaccurate representation of the system nonlinearities may lead to anerroneous prediction of the frequency response.