Abstract
Multilayers with a sequence of YBa 2Cu 3O 7/PrBa 2Cu 3O 7/YBa 2Cu 3O 7 have been sputtered epitaxially on [001] SrTiO 3 substrates. The heterostructures of these samples have been characterized by high-resolution electron microscopy, Rutherford backscattering and energy-dispersive X-ray analysis. The results indicate a correlation between the substrate quality and the microstructure of the thin films. Substrates with low defect density, a very smooth surface, and good orientation favour the epitaxial growth of all three layers. The chemical composition across the interface changes within the dimension of one unit cell.
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