A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

Abstract

We studied the behaviour of the cylindrical magnetron discharge in argon and xenon. We concentrated ourselves mainly on description of the transport of charge carriers in the region from the negative glow to the anode. We attempted to describe this transport using Monte-Carlo simulations as well as by standard transport parameters, mobility and diffusion coefficients. We also experimentally determined the radial shape of the electron energy distribution function (EEDF) including its detectable anisotropy caused by the presence of magnetic field. For the EEDF determination we used the planar probe whose collecting surface was adjustable at different angles to the direction of the magnetic field as well as movable in radial direction. The results of modelling and experiment are discussed.