Abstract
Thermally Stimulated Current (TSC) measurements were carried out for MOCVD-grown PZT thin films in order to investigate the correlation between defects and polarization fatigue. Two types of peaks were observed in TSC signals; one originated from depolarization of space charge dipoles, and the other from trapped electronic charge carriers. In the latter TSC peaks, it was found that the density of the trap centers increases with polarization cycles, indicating that the defects in the PZT films deeply relate to fatigue process.
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