A Study of Self-Aligned Nitride Erasable OTP Cell by 45-nm CMOS Fully Compatible Process

Abstract

This brief proposes a new 45-nm erasable one-time programming cell with a self-aligned nitride (SAN) storage node for logic nonvolatile memory (NVM) applications. The CMOS fully logic-compatible cell was successfully demonstrated using 45-nm CMOS technology with a very small cell size of 0.1188 mum2. This cell-adapting source-side-injection programming scheme has a wide on/off window and superior program efficiency. The SAN cell with five terminals for various operational conditions uses an asymmetrical read voltage to verify the position of the stored charge. This cell also exhibits excellent data retention capability even when the thickness of the logic gate oxide is less than 20 A, and the gate length is shorter than 40 nm. This new cell provides a promising solution for logic NVM beyond a 90-nm node.