Abstract
Aiming at development of evaluation scheme for strength design and reliability of MEMS structure, this paper proposes prediction method of static fracture strength of specimens patterned by Bosch process. Two types of specimens made of single crystal silicon with different stress distributions were prepared for measuring the fracture strength. Four-point bending test in different loading directions was carried out to consider distribution of the state of damage due to machining. Relationship between cumulative fracture probability and applied stress was investigated by applying Weibull statistics and performing finite element method (FEM) simulation. It demonstrated the possibility of quantitative prediction for the fracture strength of specimens with arbitrary shapes.
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