Abstract
In this study, we design the structure of a piezoelectric energy hevesting device with high power generation performance at a desired frequency using topology optimization. Specifically, a unimorph-type energy hervesting device with a piezoelectric film on one side of a silicon cantilever beam is targeted for design. The structures of the substrate and piezoelectric film parts are simultaneously optimized. We impose constraints to avoid structures where only the piezoelectric film remains in the area where there is no substrate. Several numerical examples are presented using the developed method to confirm effectiveness of the method.
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