Abstract
Using industrialized F2 lasers, excimer lasers and diode pumped Nd:YAG lasers we have performed micromachining tests for various materials and processing conditions in the wavelength range from 1064 nm (IR) to 157 nm (VUV). To make the results comparable, the pulse repetition rate and fluence were kept constant. Samples are presented and evaluated comparatively with respect to the ablation rate and the quality of the structural features that were generated. The goal is to supply basic performance data for engineering and design purposes as well as for feasibility studies and cost of ownership calculations.Using industrialized F2 lasers, excimer lasers and diode pumped Nd:YAG lasers we have performed micromachining tests for various materials and processing conditions in the wavelength range from 1064 nm (IR) to 157 nm (VUV). To make the results comparable, the pulse repetition rate and fluence were kept constant. Samples are presented and evaluated comparatively with respect to the ablation rate and the quality of the structural features that were generated. The goal is to supply basic performance data for engineering and design purposes as well as for feasibility studies and cost of ownership calculations.
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