Abstract
The conditions of the stable burning of high-current discharge with a self-heating hollow cathode and a hollow anode were studied. The parameters of the ion flow and the double electric layer arising in the vicinity of the hollow anode aperture were determined. It was shown that the use of a hollow anode allows for increasing the ion current density ∼2-fold compared to the mode of discharge burning with a flat anode and provides for an increase in the molecular gas dissociation degree. Single-phase nanocrystalline α-Al2O3 coatings were obtained at a temperature of 600°C using the reactive anode Al evaporation technique.
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