Abstract

Dark and illuminated capacitance–voltage ( C– V) characteristics and admittance measurements were carried out on multilayer carbon structures. The latter were produced by depositing ultrathin amorphous carbon layers with different optical band gaps on a monocrystalline boron-doped silicon substrate. The carbon layers were grown either by magnetron sputtering (MS) of a graphite target in argon or by plasma ion beam deposition (IBD) in cyclohexane. The structures were characterised by X-ray reflectivity (XRR). With respect to their electrical properties, it was shown that light strongly affects both the C– V-characteristics and the admittance. The results were interpreted in terms of the energy levels in these amorphous carbon multilayer structures.

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