Abstract
The paper describes using techniques of structural engineering in a comprehensive study of the effects of the negative displacement potential, nitrogen and argon pressures, as well as the distance from a sample to the cathode on the processes of sputtering and depositing. In practice, it is highly important to obtain steel surfaces with high mechanical properties and low roughness. The highest microhardness is manifested at the highest degree of sputtering on the samples at Ub=–1,300 V. It has been determined that the presence of nitrogen in the vacuum chamber shifts the equilibrium point of sputtering and depositing towards a higher Ub. It has been established that the presence of argon in the ion bombardment process increases the sputtering rate, whereas the presence of active nitrogen gas reduces the deposition rate due to nitride formations on the surface. The point “sputtering-depositing” shifts: in the case of Ar (from Ub=–350 V to Ub=–200...–300 V) when the RN increases from 0.002 Pa to 0.66 Pa, respectively. In the case of nitrogen, when PN increase from 0.02 Pa to 0.08 Pa, the point shifts from Ub=–400 V to Ub=–600 V (at a distance of 300 mm from the cathode to the sample).
Highlights
A vacuum arc method is widely used for applying wear-resistant coatings based on nitrides of refractory metals, in particular titanium [1], zirconium [2], chromium [3, 4], molybdenum [5, 6], as well as multi-element alloys with them [7, 8]
Н, GНP,аGPа most significant increase in the microhardness occurs in the process of sputtering on the surface of a sample at a high value of Ub=–1,300 V at a distance of 300 mm (Fig. 3), which is associated with the diffusion of niobium deep into steel
It has been determined that the cleaning process produces a diffusion saturation of steel with niobium, which leads to an increase in its hardness and resistance to crack formation
Summary
A vacuum arc method is widely used for applying wear-resistant coatings based on nitrides of refractory metals, in particular titanium [1], zirconium [2], chromium [3, 4], molybdenum [5, 6], as well as multi-element alloys with them [7, 8] These coatings have a high heat of forming the implementation phases and, a strong force of the covalent bonding. Quite often in practice, when large size products are sputtered for coating in a vacuum chamber, there happen gassing from the sides and a possible opening of pores in the metal, which results in a pressure spike in the chamber These gases are mostly nitrogen and oxygen, which react with ionized niobium to form compounds; instead of cleaning and activating the workpiece surface, there occurs sedimentation of the coating. This technology can be practically used in the preparation of steel surfaces with low roughness and high mechanical properties
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