A study of a slim compact piezo inertia actuator

Abstract

Most previously reported inertia actuators suffer from the problems of low speed and large size. To overcome these shortcomings, this study proposes a slim compact piezo inertia actuator based on the principle of stick–slip drive. Actuated by the transverse motion of a cantilever beam forming part of a monolithic elastomer, this actuator achieves a high velocity. The construction and basic operating principle of the actuator are discussed in detail. Commercial finite element analysis software is employed to determine the appropriate geometry for the monolithic elastomer. To study the actuator’s mechanical characteristics, a prototype is fabricated and a series of experimental tests are performed. According to the results of these tests, the maximum velocity and maximum load force are about 24.03 mm/s and 1.96 N, respectively, and the minimum step size is about 0.47 μm. It is shown that the inertia actuator based on a monolithic elastomer with a cantilever beam not only has a slim compact structure, but also exhibits good output characteristics.