A structure study of the electroless deposition of Au on Si( [formula omitted]):H

Abstract

Electroless deposition of gold in monolayer amounts on hydrogen terminated Si(1 1 1) was studied by a variety of structure sensitive techniques. Rutherford back scattering data revealed a linear relationship between the Au coverage and the concentration of the Au solution used for deposition. Atomic force microscopy and surface X-ray diffraction studies indicated cluster formation, with the Au(1 1 1) face epitaxially aligned to the Si(1 1 1):H substrate. However, X-ray standing wave experiments at coverage below one monolayer suggested the formation of a gold layer. Both clusters and isolated Au atoms appear to be present at all coverages, which is explained by the formation of type of Au `wetting layer', in addition to cluster formation which increases as the coverage increases.