Abstract
ABSTRACTA procedure for batch processing of up to four specimens for cross-sectional transmission electron microscopy (X-TEM) has been developed. The technique is essentially an extension of the standard multi-slice composite full disc sample preparation method. However, disc cutting and dimple grinding steps have been eliminated. The trimming, gluing, stacking, and sectioning of the wafers from the original sample material to produce composite transverse sections are identical to those of the standard scheme. Grinding and polishing of the sections are carried out in a batch mode which, in turn, reduces the overall processing time per specimen. The prepared composite foils are mounted on metallic disc grids which provide structural support during ion thinning and microscopy.
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