Abstract
The ability to achieve accurate and reliable lifetime prognostics is critical to predictive maintenance of nano/micro motion systems. However, techniques to accomplish this task have not been well studied. This paper presents a stiffness-based degradation model for lifetime monitoring of a considered nanopositioning stage. Based on the dynamic model of the stage, an analysis of the relationship between system stiffness, running time and failure lifetime is investigated. A failure lifetime prognostic model for the stage is formulated by means of a dynamic stiffness analysis. This methodology is evaluated with numerical simulation and verified based on our experimental setup. The results reveal that this model can be used to effectively predict the failure lifetime and the remaining life of the investigated stage, which suggests its promising potentials in real applications.
Highlights
Precision motion systems have emerged as one of the key technologies in advanced engineering fields, such as scanning probe microscopy (SPM), semiconductor lithography and memory storage [1, 2, 3]
Based on the results provided by Prognostic and Health Management (PHM), available resources and operational demand, health management will take appropriate maintenance actions and making accurate logistics decisions
We first provide a description of investigated nanopositioning stage, and present the proposed degradation model
Summary
Precision motion systems have emerged as one of the key technologies in advanced engineering fields, such as scanning probe microscopy (SPM), semiconductor lithography and memory storage [1, 2, 3]. The applications of such systems have been successfully extended to more sophisticated manipulations supporting advanced tasks, such as: nanoassembly [4], cell injection [5, 6, 7], etc. In such situations, with the aid of an employed. Journal of Prognostics and Health Management 1(1), 2021 mechanical displacement magnifier, the motion systems can realize nano/micro-scale accuracy of motions with a driver such as piezoelectric actuator (PEA) and voice coil motor (VCM). Note that the motion accuracy of nano/micro motion systems degrades during its long-term working process. The degradation in nano/micro systems is a natural and unavoidable phenomenon
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