Abstract
Crystallized titania layers were prepared by vacuum sputtering in a DC magnetron. Photocatalytic properties of the crystals were analyzed using degradation of formaldehyde in a self-conception reactor. All data were analyzed using classical curve dependence and statistical. This study used Anova to find correlations between photocatalytic properties of the crystals and deposition parameters. The considered parameters were pressure, temperature of substrate, argon concentration and time of sputtering, all of this measured during the active process.
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