Abstract
Journal Article A Static Low Energy Ion Source for Local Surface Modification Get access Johannes J L Mulders, Johannes J L Mulders FEI Company, Achtseweg Noord 5, 5600KA Eindhoven, The Netherlands Search for other works by this author on: Oxford Academic Google Scholar Petrus HF Trompenaars Petrus HF Trompenaars FEI Company, Achtseweg Noord 5, 5600KA Eindhoven, The Netherlands Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 630–631, https://doi.org/10.1017/S1431927616004001 Published: 25 July 2016
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