A sputtering calculation: Angular dependence of sputtering yields

Abstract

The material erosion induced by physical sputtering resulted from bombardments of hydrogen, helium and their isotopes is a critical problem for fusion technique. An important feature for such ion-induced sputtering is isotropic incidence condition. Therefore it is necessary to develop a sputtering theory which can be applied to the case of obliquely incident ion beams. The sputtering theory based on the bipartition model of ion transport has recently extended to treat the problem of sputtering calculation for the case of obliquely incident ion beam. In the present paper some calculation results have been given out. Comparison shows that the angular dependence of sputtering yields given by the bipartition model is in reasonable agreement with that given by TRIM-SP Monte Carlo code and experimental measurements.