Abstract

A spin rotator for observing magnetic domains with all three magnetization components of a sample surface by spin-polarized scanning electron microscopy (spin SEM) has been developed. The spin rotator is placed between the sample and the spin detector in a spin SEM, and can rotate the polarization vector of secondary electrons by π/2. Although the spin detector itself can detect only two independent polarization components, the rotation of polarization makes third-component detection possible. The conventional spin rotator, which is a well-known energy filter named a Wien filter, has been much improved to have a large focusing area by using hyperbolic cylindrical pole pieces as a magnet and several auxiliary electrodes. As a result, all the secondary electrons emitted from the area of a surface as large as 1 mm in diameter can pass the spin rotator with uniform spin rotation, and the distribution of all three magnetization components can be imaged successfully by spin SEM.

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