A Spherical-Aberration Corrector Using Electrontransparent Conducting Foils

Abstract

One of the problems associated with building any aberration-corrected electron microscope objective lens lies in the difficulty of obtaining a sufficiently short focal length. A number of systems have focal lengths in the 1cm. range, and these are more suitable for microprobe work. If the focal length can be made short enough, the chromatic aberration probably does not need to be corrected, and the design is much simplified. A corrector device which can be used with a conventional magnetic objective lens of short focal length (Fig. 1) must either have dimensions comparable to the bore and gap of that lens, or have very large magnetic or electric field gradients. A successful approach theoretically has been to use quadrupoleoctopole corrector units, although these suffer from very large fifth order aberrations and a limited field of view.