A spectroscopic method to determine the electron temperature of an argon surface wave sustained plasmas using a collision radiative model

Abstract

A method is presented to determine the electron temperature in a low pressure argon plasma using emission spectroscopic measurements and a collisional radiative (CR) model. Absolute line intensity measurements are made in order to construct the atomic state distribution function. In addition to the excited states, the ground state density is also taken into account. Because of this, the excitation temperature can be determined with high precision. A CR-model has been used to determine the degree of equilibrium departure and to obtain the relationship between the excitation temperature and the electron temperature. This method is applied to a microwave plasma which has been generated inside a quartz tube using a surfatron device. The densities of argon levels close to the continuum are used to get an estimated value of the electron density. These values are used as input data for the CR-model. For an argon pressure of 6 mbar, the 4p level densities vary between 8 × 1014 and 6 × 1015 m−3. Using the estimated values for the electron density, between 2 × 1019 and 3 × 1019 m−3, the electron temperature was found to range between 1.15 and 1.20 eV. An extensive error analysis showed that the relative error in the electron temperature is less than 6%.