Abstract
The structure of the electrode region of an electrode microwave discharge is subjected to the spectroscopic-and–optical investigation in hydrogen at a pressure of 1–8 torr and incident power up to 100 W. It is shown that the electrode region has an inhomogeneous structure which, in the lower pressure range, is defined by the plasma resonance which is insignificant in the upper range of the investigated pressures.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.