Abstract
We present a frequency selective vibration detection system based on tunable micromechanical resonators for the frequency range 1–10 kHz. The Single Crystal Reactive Etching and Metallization (SCREAM)-fabricated sensor structure consists of an array of eight resonators with stepped base frequencies between 2.8 and 10.2 kHz. The resonators provide a resonance frequency tuning capability by electrostatic forces to set the detection frequency to the desired value. Experimental results of the fabricated resonator arrays are presented. A maximum tuning voltage of 35 V is required for continuous resonance frequency tuning from 1 to 10 kHz. The amplitude range of the resonators amounts to 10 μm. Over the whole amplitude range, a maximum resonance frequency shift of 0.7% was measured. An increase of ambient temperature from 30 to 150 °C results in a small resonance shift of 0.5% and to an increase of resonance peak bandwidth of 23%. The sensor structure is part of a vibration detection system, which is completed with analogue and digital circuitry. Test measurements with the system demonstrate its functionality and applicability in an industrial environment.
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