A smart sensor using MEMS technology for artificial environmental monitoring

Abstract

In this paper micro cantilever’s different layers has been coated with suitable sensing materials using COMSOL multiphysics software. It acts like a pressure sensor due to applied pressure or total force to investigate the different facts about the mechanical properties. Reason for calling this device a smart sensor because it is very sensitive compared to electronic sensors and it can be interfaced easily with other systems under different environments for diverse findings and analysis. At first, a micro cantilever has been modelled with different layers (using suitable materials) and its different modes have been tested. Here test was done using silicon and silicon dioxide material in two different modes as static and dynamic. Variation of displacement, stress, strain and some other mechanical properties has been checked. Next, a pressure sensor was modelled and efforts were made to understand the various methods of assessing pressure sensors. In the third stage, electrical properties have been calculated using a weight stone bridge by adjusting the resistance and output sources to identify the facts. Electrical analysis was done to recognize the response of voltage due to any changes in resistance important to establish the ideal placement for the piezoresistive material and illustrate the pressure value. Improvement in capacitance by varying sensing materials, in this micro cantilever, helped for the testing of various sensing materials. Again pressure levels have been calculated in diverse mediums like liquid and gas (air) using different sensing materials as gold or ZnO respectively. Optimization was done by changing the materials, change in shapes as well as it was analyzed by changing the dimensions of the pressure sensor with the help of a micro-cantilever structure based concept. This work is much valuable for environmental monitoring and related applications.