Abstract
A new type of two-dimensional (2D) position-sensitive detector (PSD) for precise light beam position sensing is reported. Four wide MOSFET gates are added around the square sensing area of a conventional tetralateral 2D PSD. This changes the tetralateral 2D PSD to a one-dimensional (1D) PSD, but its sensing direction can be alternated between the horizontal and vertical directions. This results in as good a linearity of position sensing in the 2D PSD as in the 1D PSD. Experimental results show the position non-linearity of the output signal to be drastically reduced from 7% in the conventional operation to 0.02% in the MOSFET switching operation. The maximum operating frequency of the MOSFETs is about 5 kHz for this prototype device.
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