Abstract
A new slit-end extraction Penning ionization gauge ion source with a SmCo permanent magnet has been developed. The cathode is a 5 mm diam×25 mm long LaB6 cylinder, the anode with a hole of 8×32 mm is made in stainless steel, and the ion emission hole size on the anticathode is in a range of 14–28×2 mm for the different limited extraction current. The preliminary experiment indicated that the discharge was easy and smooth for this source. More than 10 mA of the total beam current for the positive oxygen ion has been measured at discharge current 200 mA and extraction voltage 25 kV and the milliampere magnitude of the negative oxygen ion beam can be extracted from this source.
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