Abstract

This paper reports an advanced multi-axis micro actuation and sensing platform for in situ self-calibration of generic MEMS inertial sensors. Compared to previously reported platforms, the device provides the best performance at smallest footprint, with six-axis actuation at low power consumption, off-axis motion compensation, closed-loop capacitive sensing of applied stimulus, integrated interconnects to an inertial sensor load, and increased shock protection. The entire platform is confined to 9×9 mm2.

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