Abstract
A single-fundamental-mode photonic crystal (PhC) vertical cavity surface emitting laser (VCSEL) with seven-point defect was fabricated by etching two-dimensional PhC on surface of the VCSEL's top distributed Bragg-reflector (DBR). The PhC was fabricated using electron beam lithography (EBL) and inductive coupled plasma reactive ion etching (ICP-RIE). The single-fundamental-mode performances were investigated and demonstrated. The device with output power 0.7mW under continuous-wave (CW) operate, half maximum of the lasing spectrum less than 0.06nm, far field divergence angle less than 10° and side mode suppression ratio over 35dB was obtained. The characteristics of the PhC VCSEL operating at pulse condition are compared with VCSEL with the similar aperture size, we found that the output power of PhC VCSEL increased more than conventional VCSEL with the impulse duty factor decreased, corresponding to 100% and 32%, respectively.
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