A simulation optimization framework to solve Stochastic Flexible Job-Shop Scheduling Problems—Case: Semiconductor manufacturing

Abstract

This paper addresses a Stochastic Flexible Job-Shop Scheduling Problem (SFJSSP) in the context of semiconductor manufacturing. Semiconductor industry is among the most capital-intensive businesses whose operational excellence is of vital importance. Within the front-end fab of the semiconductor industry, the photolithography workstation is the well-known bottleneck process. To elevate the performance of the whole semiconductor manufacturing system, developing a competent schedule for its bottleneck is essential. However, the re-entrant product flows, high uncertainties in operations times, and rapidly changing products and technologies within the photolithography, make it difficult to develop a schedule for the whole semiconductor fab. Considering Industry 4.0, hybrid methods such as Simulation Optimization (SO) have proven their applicability in addressing complex production scheduling problems. Thus, this paper develops a mathematical model for SFJSSP of the semiconductor manufacturing considering special constraints of the photolithography workstation (machine process capability, machine dedication, and maximum reticles (masks) sharing constraints). Next, we transform the developed model into an SO model integrated with a computer simulation model capable of modeling the photolithography workstation. The simulation model develops an initial schedule based on the Least Work Remaining (LWR) dispatching rule. Moreover, the simulation model calculates the objective function of the SFJSSP. A tailored Genetic Algorithm (GA) is then developed, which attempts to optimize the initially proposed schedule. To validate the superiority of the presented SO methodology in addressing SJSSPs, it is compared with previously proposed methods. Furthermore, to assess the impact of the three special constraints of the photolithography work area on system performance, two sets of experiments are proposed. In the first set of experiments, the performance of two SFJSS environments, one with the special constraints and one without, is compared. The second set of experiments involves observing the system’s performance while systematically varying the severity of the special constraints. The results indicate that improved performance levels can be accomplished by enhancing flexibility within both the operations of individual jobs and the machines within the manufacturing system.