Abstract
Each of dis- and re-assembly for maintenance requires a quadrupole residual gas analyzer (QRGA) fitted into a fully demountable vacuum envelope. Possible ways of mounting a simple self-supporting quadrupole analyzer and ion-source assembly in a vacuum envelope constructed from commercially available ultra-high vacuum (UHV) fittings are considered and the QRGA which has been constructed using one of these formats is described. The features of the quadrupole assembly which lead to both simplicity of construction and adjustment and at the same time result in an assembly which has dimensional stability under repeated bakeout to 350°C are discussed. The specific features of the QRGA are discussed, and its capabilities and performance are indicated with residual gas spectra in an ion-pumped UHV system.
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