Abstract
Cylindrical grating angle sensor is a common angle measuring device with high precision. Due to the reflecting arc surface of the cylindrical grating the effects of relative displacement of graduation line and gap variation will interact. Significant residual errors still exist even with high precision cylindrical grating and multiple reading heads around the scale disc .In this paper, based on the principle of circumference closure, the principle of self-calibration is deduced and analyzed in detail. The calibration curve is obtained by obtaining the deviation between the certain position and an ideal position of the graduation line position in real time. A simple self-calibration method of cylindrical grating is acquired. It can calibrate random errors and system errors with time and improve the angle measurement accuracy. The method has the advantages of simple structure and strong maneuverability, and provides technical means for the miniaturization and high precision of cylindrical grating.
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