Abstract
The modal vibration of the rotor of the magnetic levitated turbomolecular pumps(MLTMP) is one of the key issues affecting the high-speed stable operation of the magnetic levitation turbo rotor-bearing system. Aiming at the problem of the modal self-excited oscillation of the magnetic levitation turbo rotor system, a rotor dynamics modeling method is proposed according to the structural characteristics of the rotor. The variation rules of the rotor mode is obtained by the numerical simulation method and the experiment. Then, based on the proposed model, the phase compensation method is adopted to effectively restrain the modal self-excited oscillation of the rotor. Finally, experiments were carried out on the MLTMP prototype, and the results showed the accuracy and effectiveness of the proposed scheme.
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