Abstract
When a micromechanical resonator is moving in air, resistance to motion causes damping which is proportional to the velocity of the resonator. This results in a low quality factor and reduces the sensitivity of the resonator and hence any sensor incorporating the resonator, to any environmental changes. In this paper, a method for increasing the quality factor of micromechanical resonant sensors using velocity feedback is reported. To achieve this, the feedthrough signal between drive and sense connections due to parasitic capacitance is first cancelled in order to remove the previously unreported, undesirable effects that occur from the combination of velocity feedback and capacitive feedthrough. Using this technique, the quality factor of a resonator in air is increased by over two orders of magnitude.
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