Abstract

An instrument is described which is capable of measuring pressure differences up to at least 50 mtorr with an accuracy to ±2% without temperature control. The pressure difference is applied across a diaphragm of aluminized Terylene which forms one plate of a capacitor. Using a commercial capacity bridge to measure the changes of capacity, a change in pressure difference as small as 40 μtorr can be detected. The instrument can be both cheaply and simply manufactured.

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