Abstract
The position and the separation of the adjacent maxima and minima of the interference bands of an amorphous hydrogenated silicon film doped with aluminum are used to determine the order value unambiguously, the optical thickness to accuracy ranging from eight parts in 10 5 to one part in 10 3, and the refractive index accurately to ±0.03 across a wide spectral interval 0.5–2.5 μm. The dependence of the film dispersion on the doping concentration is expressed in terms of a polynomial dispersion function whose coefficients vary with the doping concentration.
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