Abstract
The accuracy of a heterodyne interferometer is oftenlimited by the periodic nonlinearity that arises mainly fromimperfect separation of the two optical frequencies. Thispaper describes a new method for compensation of thenonlinearity in the heterodyne laser interferometer using thequadrature mixing technique for the phase measurement. Thecompensation technique is based on the elliptical fitting oftwo phase-quadrature signals obtained by a lock-in amplifier.The brief analysis and compensation scheme of the nonlinearityin the heterodyne interferometer, and the experimental result using a Zeeman stabilized He-Ne laser, have been presented. Theresults show that the suggested method can compensate for thenonlinearity of the heterodyne interferometer with sub-nanometre accuracy.
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