Abstract
We report the deposition of single-phase undoped and Ca-doped CuInO2 thin films from a readily synthesized source target of Cu2In2O5—circumventing the very difficult fabrication of CuInO2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be ∼3×10−3S∕cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry.
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