Abstract
A passive-matrix organic light-emitting diode (PMOLED) display was fabricated in a simple self-aligned imprint lithography (SAIL) method without utilizing a photolithography process. This SAIL method is a top-down fabrication process in which all layers constituting the PMOLED are deposited in advance and only the necessary parts are removed by plasma etching to fabricate the display. As an etch mask for sequential plasma etching, a three-dimensional resin structure in which all patterns are pre-aligned was formed using an imprint process. PMOLED fabrication by this SAIL process has the advantage of being very simple as it consists of only one imprint and sequential plasma etching processes. In the PMOLED with 400 pixels fabricated, all pixels operated without deterioration of OLED performance during the fabrication process.
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