Abstract

A simple external-beam ion milliprobe system was designed and constructed as part of an undergraduate honors research project. The system includes an adjustable object slit, a compact electrostatic quadrupole triplet lens, a lens positioner, and a shielded tip with a thin Kapton window through which the beam exits the accelerator vacuum and enters a sample enclosure with interlocked doors. Auxiliary equipment includes a four-segment lens-entrance collimator with a beam-current monitor that facilitates steering the beam and an interlock system that intercepts the beam when any of the doors to the sample enclosure are opened. Details of the design and construction of the system will be presented and its performance will be described.

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