A simple electron cyclotron resonance ion sourcea)

Abstract

A simple, all permanent magnet, 2.45 GHz electron cyclotron resonance ion source has been developed for the production of stable beams of low charge state ions from gaseous feed materials. The source can produce ∼1 mA of low energy (3 kV) singly charged ion current in the 10−4 Torr pressure range. The source can also be operated in a more efficient low-pressure mode at an order of magnitude lower pressure. In this latter range, for example, the ionization efficiency of Ar is estimated to be 1% with charge states up to Ar8+ present. Operation in the low-pressure mode requires low power input (∼20 W). These features make the source especially suited for use with small accelerator systems for a number of applications including ion implantation, mass spectrometry, and atomic collision experiments where multiply charged ions are desirable. Design details and performance characteristics of the source are presented.