A simple collisional–radiative model for low-pressure argon discharges

Abstract

A simple collisional–radiative model for low-pressure argon discharges is proposed. Using this model and the measured cross section data from recent literature, the relationship between the electron density and some emission line intensities is investigated, resulting in a semi-empirical formula relating the electron density and the emission intensity ratio of argon lines (from levels 3p and 4p). The electron density determined from this model is compared with that from a Langmuir probe in an inductively coupled argon plasma. The application and validity of this model in other kinds of low-pressure argon plasmas, such as capacitively coupled and helicon plasmas, or in discharges containing both argon and other gases are discussed.