Abstract
Silicon hydride (SiH 4 ) is a toxic material and should be reduced to a low concentration to prevent explosions during tungsten chemical vapor deposition. A simple method is presented for the safety assessment in this paper. Empirical equations were deduced to generalize the calculation procedure. The method should help process engineers to estimate whether a recipe will meet minimum safety requirements before a process begins.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
