Abstract
Fluctuations in scanning electron microscope (SEM) beam current necessitate normalization of energy-dispersive analysis (EDA) data collected in conjunction with the SEM. A normalization method based on monitoring the total integrated count of a stainless-steel reference before and after sample counting was developed and yielded high precision (correlation coefficient = 0.996) data from a 48-sample testing set. The technique is independent of sample composition, counting time, time between sample analyses, magnification during analysis, and requires no modification to the basic SEM—EDA system.
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