Abstract

— Crystalline-silicon-chip-based reflective light valves are suitable for realizing high definition and bright liquid-crystal projectors. We have developed an XGA (1025 × 769 pixels) silicon-chip-based light valve with a diagonal display area of 2.54 cm (1 in.). The reflective twisted-nematic mode was examined by using the Jones matrix method as a display mode, and the normally white reflective twisted-nematic mode was selected. This mode is suitable for a narrow cell gap, and a fast response time can be expected. In addition, the driving voltage of this mode is low and has good chromaticity with small retardation. The cell gap of the light valve is 2 μm. The cell gap support is made using spacer posts formed on the silicon chip with a photodefinable resin. The response time is 12 msec, including both rise and fall times. The contrast ratio is more than 1000 at 5 Vrms.

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