A Silicon Shallow-Ridge Waveguide Integrated Superconducting Nanowire Single Photon Detector Towards Quantum Photonic Circuits**Supported by the National Key R&D Program of China under Grant Nos 2017YFA0303704 and 2017YFA0304000, the National Natural Science Foundation of China under Grant Nos 61575102, 91750206, 61671438, 61875101 and 61621064, the Beijing Natural Science Foundation under Grant No Z180012, and the Beijing Academy of Quantum Information

Abstract

A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 μA, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.