Abstract
A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 μA, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
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