Abstract
Using electron cyclotron resonance plasma deposition, we have developed an SiOx film as an antireflective layer (ARL) for the gate process of LSI fabrication by i-line and KrF lithography. The ARL is an absorption type and is 100 nm thick. The estimated optimum optical properties of the ARL for i-line were n=2.3–2.6 and k=0.5–0.6. For KrF, they were n=1.8–2.1 and k=0.5–0.6. An SiOx film having these properties can be reproducibly deposited at SiH4/O2 gas flow rate ratio of 1.3 for i-line and 1.1 for KrF. The chemical compositions of the films are SiO0.5 for i-line and SiO1.0 for KrF. The SiO0.5 film was used as an i-line ARL for 0.35-µ m LSI gate fabrication and superior process performance and sufficient critical dimension controllability (variation within 19 nm of 3σ) were obtained.
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