Abstract
An automatic short-time pulsed probe plasma analyser is described which has been developed for the investigation of concentric non-equilibrium plasmas with unidirectional electron and ion flow in an ion source with high emission density. Besides plasma potential and ion saturation current the electron energy distribution can be measured up to values of 300 eV and simultaneously integrated to obtain the electron density. These four parameters determined serially in a total of less than 2s at 46 different locations in the plasma are stored in a recirculating shift register memory and displayed on an oscilloscope for further analysis. Because of the short measuring time (compared to the depletion time of the higher energy electrons) distortion-free measurements of widespread electron energy distributions or high resolution measurements of the same are possible. The device has also been applied to the determination of transformation energies of plasma chemical reactions.
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