Abstract
In this paper, we propose a sulfur hexafluoride(SF6) gassensor using a dual track surface acoustic wave (SAW) device based on multi-wall carbon nanotubes(MWCNTs). The sensor consists of a dual track SAW device and MWCNT film sensitive toSF6 gas. The measurement acoustic track of the sensor is coated with anMWCNT film treated by an acid process which selectively absorbsSF6 gas, while the reference acoustic track is uncoated. Experimental results confirm that theSF6 gas sensor using a dual track SAW device based on multi-wall CNTshas good response characteristics to different concentrations ofSF6 gasfrom 0.5 to 20 ppm. The sensor has good linearity and reproducibility, and its sensitivity is approximately7.4 kHz ppm−1. Furthermore, the sensor has a smaller cross-sensitivity forSO2 and HF.
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