Abstract
A required senior undergraduate course on CMOS process integration was recently added to the microelectronic engineering curriculum at RIT The objective of the course is to educate the students in the field of device/integration engineering in the semiconductor industry. The topics Include front-end of the line process integration and the physics of submicron CMOS devices. At the end of the course, the students are asked to do the structural design and the electrical evaluation of 0.25 /spl mu/m, 2.5 V NMOS transistors.
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